Semiconductor, integrated circuit chips and packaging, liquid crystal displays, high-precision circuit boards, optoelectronic devices, various electronic devices, microelectronics industry, large-scale and ultra large scale integrated circuits and other electronic industries require a large amount of pure water and ultrapure water to clean semi-finished and finished products. The higher the integration level of integrated circuits, the finer the wiring diameter between the components or connecting components on the chip, and the higher the requirements for water quality. The quality of ultrapure water has become one of the important factors affecting the quality, production yield, and production cost of electronic component products.